1. Contamination-free manufacturing for semiconductors and other precision products. (2018) Authors: Donovan, R. P Record Type: Book Extent: 1 online resource (x, 448 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Handbook of semiconductor interconnection technology. (2006) Other Names: Schwartz, G. C; Srikrishnan, K. V, 1948- Record Type: Book Extent: 1 online resource (520 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Handbook of semiconductor manufacturing technology. (©2008) Other Names: Doering, Robert, 1946-; Nishi, Yoshio, 1940- Record Type: Book Extent: 1 online resource (1 volume (various pagings)), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Microlithography fundamentals in semiconductor devices and fabrication technology. (2018) Authors: Nonogaki, Saburo, 1930-; Itō, Toshio; Ueno, Takumi, 1951- Record Type: Book Extent: 1 online resource (v, 327 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Nanoscale silicon devices. (2016) Editors: Oda, Shunri; Ferry, David K Record Type: Book Extent: 1 online resource, illustrations (black and white, and colour) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Particle control for semiconductor manufacturing. (2018) Authors: Donovan Editors: Donovan, R. P Record Type: Book Extent: 1 online resource View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Run-to-run control in semiconductor manufacturing. (2001) Other Names: Moyne, James; Del Castillo, Enrique; Hurwitz, Arnon Max; CRC Press. Record Type: Book Extent: 1 online resource (348 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Scientific wet process technology for innovative LSI/FPD manufacturing. (2006) Other Names: Ōmi, Tadahiro, 1939- Record Type: Book Extent: 1 online resource (386 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Scientific wet process technology for innovative LSI/FPD manufacturing. (2018) Editors: Ōmi, Tadahiro, 1939- Record Type: Book Extent: 1 online resource, illustrations (black and white) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. Semiconductor microchips and fabrication : a practical guide to theory and manufacturing /: a practical guide to theory and manufacturing. (2022) Authors: Lian, Yaguang Record Type: Book Extent: 1 online resource View Content: Available online (eLD content is only available in our Reading Rooms) ↗