Particle control for semiconductor manufacturing. (2018)
- Record Type:
- Book
- Title:
- Particle control for semiconductor manufacturing. (2018)
- Main Title:
- Particle control for semiconductor manufacturing
- Further Information:
- Note: Edited by R.P. Donovan.
- Authors:
- Donovan
- Editors:
- Donovan, R. P
- Edition:
- 1st
- Publisher Details:
- London : Routledge
- Publication Date:
- 2018
- Extent:
- 1 online resource
- Subjects:
- 621.38152
Semiconductors -- Design and construction
Semiconductors -- Defects
Particles - Languages:
- English
- ISBNs:
- 9781351425742
- Related ISBNs:
- 9781351425759
9781351425735
9780203744307 - Notes:
- Note: Description based on CIP data; resource not viewed.
- Access Rights:
- Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
- Access Usage:
- Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD.DS.303733
- Ingest File:
- 01_224.xml