Run-to-run control in semiconductor manufacturing. (2001)

• Record Type: Book
• Further Information: Note: Edited by James Moyne, Enrique del Castillo, Arnon Max Hurwitz.
• Other Names: Moyne, James; Del Castillo, Enrique; Hurwitz, Arnon Max; CRC Press.
• Contents: Front Cover; Preface; Editors; Contributors; Foreword; Table of Contents; Introduction; 1. Advanced Process Control in the Semiconductor Industry; 2. Process Control and Optimization Methods for Run-to-Run Application; 3. Basic R2R Control Algorithms; 4. Learning and Optimization Algorithms for an Optimizing Adaptive Quality Controller; 5. An Adaptive Run-to-Run Optimizing Controller for Linear and Nonlinear Processes; 6. A Comparative Analysis of Run-to-Run Control Algorithms in the Semiconductor Manufacturing Industry.
• Publisher Details: Boca Raton : CRC Press
• Publication Date: 2001
• Extent: 1 online resource (348 pages), illustrations
• Subjects: 621.3815/2; Semiconductors -- Design and construction; Semiconductor industry -- Production control; Electronic packaging; Production management; Engineering; Engineering: Electrical; TECHNOLOGY & ENGINEERING -- Mechanical; Electronic packaging; Production management; Semiconductor industry -- Production control; Semiconductors -- Design and construction; Electronic books
• Languages: English
• ISBNs: 9781420040661; 1420040669
• Related ISBNs: 0849311780; 9780849311789
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.