Contamination-free manufacturing for semiconductors and other precision products. (2018)
- Record Type:
- Book
- Title:
- Contamination-free manufacturing for semiconductors and other precision products. (2018)
- Main Title:
- Contamination-free manufacturing for semiconductors and other precision products
- Further Information:
- Note: Edited by Robert P. Donovan.
- Authors:
- Donovan, R. P
- Contents:
- Publisher Details:
- Boca Raton, FL : CRC Press
- Publication Date:
- 2018
- Copyright Date:
- 2001
- Extent:
- 1 online resource (x, 448 pages), illustrations
- Subjects:
- 621.38152
Fertigung
Halbleitertechnologie
Semiconductors -- Defects
Semiconductors -- Design and construction
Semiconductors -- Defects
Semiconductors -- Design and construction
Electronic books - Languages:
- English
- ISBNs:
- 9781482289992
1482289997
9780824703806
0824703804 - Notes:
- Note: Includes bibliographical references and index.
- Access Rights:
- Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
- Access Usage:
- Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD.DS.474140
- Ingest File:
- 02_624.xml