1. (Invited) A Complete Suite of Experimental Techniques for Electrical Characterization of Conventional and Incoming High-k Dielectric-Based Devices. (26th April 2016) Authors: Dueñas, Salvador; Castán, Helena; García, Héctor; Arroval, Tonis; Tamm, Aile; Kukli, Kaupo; Aarik, Jaan Journal: ECS transactions Issue: Volume 72:Number 2(2016) Page Start: 153 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Atomic layer deposited nanolaminates of zirconium oxide and manganese oxide from manganese(III)acetylacetonate and ozone. (26th May 2021) Authors: Kalam, Kristjan; Rammula, Raul; Ritslaid, Peeter; Käämbre, Tanel; Link, Joosep; Stern, Raivo; Vinuesa, Guillermo; Dueñas, Salvador; Castán, Helena; Tamm, Aile; Kukli, Kaupo Journal: Nanotechnology Issue: Volume 32:Number 33(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Atomic Layer Deposition and Characterization of Dysprosium‐Doped Zirconium Oxide Thin Films1. Issue 7 (September 2015) Authors: Tamm, Aile; Kozlova, Jekaterina; Arroval, Tõnis; Aarik, Lauri; Ritslaid, Peeter; García, Hector; Castán, Helena; Dueñas, Salvador; Kukli, Kaupo; Aarik, Jaan Journal: Chemical vapor deposition Issue: Volume 21:Issue 7/9(2015:Sep.) Page Start: 181 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films. (1st January 2018) Authors: Kukli, Kaupo; Kemell, Marianna; Castán, Helena; Dueñas, Salvador; Seemen, Helina; Rähn, Mihkel; Link, Joosep; Stern, Raivo; Heikkilä, Mikko J.; Ritala, Mikko; Leskelä, Markku Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 5(2018) Page Start: P287 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films. (24th May 2018) Authors: Kukli, Kaupo; Kemell, Marianna; Castán, Helena; Dueñas, Salvador; Seemen, Helina; Rähn, Mihkel; Link, Joosep; Stern, Raivo; Heikkilä, Mikko J.; Ritala, Mikko; Leskelä, Markku Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 5(2018) Page Start: P287 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Atomic Layer Deposition and Properties of HfO2-Al2O3 Nanolaminates. (1st January 2018) Authors: Kukli, Kaupo; Kemell, Marianna; Castán, Helena; Dueñas, Salvador; Seemen, Helina; Rähn, Mihkel; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 9(2018) Page Start: P501 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Atomic Layer Deposition and Properties of HfO2-Al2O3 Nanolaminates. (6th September 2018) Authors: Kukli, Kaupo; Kemell, Marianna; Castán, Helena; Dueñas, Salvador; Seemen, Helina; Rähn, Mihkel; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 9(2018) Page Start: P501 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Atomic layer deposition of alumina on γ‐Al2O3 nanofibres. Issue 2 (14th October 2013) Authors: Jõgiaas, Taivo; Arroval, Tõnis; Kollo, Lauri; Kozlova, Jekaterina; Käämbre, Tanel; Mändar, Hugo; Tamm, Aile; Hussainova, Irina; Kukli, Kaupo Journal: Physica status solidi Issue: Volume 211:Issue 2(2014:Feb.) Page Start: 403 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone. (1st January 2018) Authors: Kukli, Kaupo; Kemell, Marianna; Mizohata, Kenichiro; Vehkamäki, Marko; Kalam, Kristjan; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 2(2018) Page Start: P1 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone. (3rd January 2018) Authors: Kukli, Kaupo; Kemell, Marianna; Mizohata, Kenichiro; Vehkamäki, Marko; Kalam, Kristjan; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 2(2018) Page Start: P1 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗