1. Dry etching technology for semiconductors. ([2014]) Authors: Nojiri, Kazuo Record Type: Book Extent: 1 online resource (xiii, 116 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Plasma etching : an introduction /: an introduction. (©1989) Other Names: Manos, Dennis M; Flamm, Daniel L Record Type: Book Extent: 1 online resource (xii, 476 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Micromachining using electrochemical discharge phenomenon : fundamentals and applications of spark assisted chemical engraving /: fundamentals and applications of spark assisted chemical engraving. (©2009) Other Names: Wüthrich, Rolf Record Type: Book Extent: 1 online resource (xiv, 181 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Plasma etching processes for CMOS devices realization. (2017) Editors: Posseme, Nicolas Record Type: Book Extent: 1 online resource View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Plasma etching processes for interconnect realization in VLSI. (2015) Editors: Posseme, Nicolas Record Type: Book Extent: 1 online resource View Content: Available online (eLD content is only available in our Reading Rooms) ↗