1. (Invited) Selective Etch of Si and SiGe for Gate All-Around Device Architecture. (11th September 2015) Authors: Wostyn, Kurt; Sebaai, Farid; Rip, Jens; Mertens, Hans; Witters, Liesbeth; Loo, Roger; Hikavyy, Andriy Yakovitch; Milenin, Alexey; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron; Mertens, Paul W.; De Gendt, Stefan; Holsteyns, Frank Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 147 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Development of a Cu and W Compatible PERR Clean in BEOL Advanced Interconnect Patterning. (11th September 2015) Authors: Kesters, Els; Le, Quoc Toan; Decoster, Stefan; Vega Gonzalez, Victor; Holsteyns, Frank; De Gendt, Stefan Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 207 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Dissolution of Germanium in Sulfuric Acid Based Solutions. (11th September 2015) Authors: Gan, Nobuko; Ogawa, Yuichi; Nagai, Tatsuo; Masaoka, Toru; Wostyn, Kurt; Sebaai, Farid; Holsteyns, Frank; Mertens, Paul W. Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 277 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Full wetting of plasmonic nanopores through two-component droplets. Issue 11 (18th August 2015) Authors: Chen, Chang; Xu, XiuMei; Li, Yi; Jans, Hilde; Neutens, Pieter; Kerman, Sarp; Vereecke, Guy; Holsteyns, Frank; Maes, Guido; Lagae, Liesbet; Stakenborg, Tim; van Dorpe, Pol Journal: Chemical science Issue: Volume 6:Issue 11(2015:Nov.) Page Start: 6564 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Nanoscale Etching: Dissolution of III-As and Ge in HCl/H2O2 Solutions. (11th September 2015) Authors: van Dorp, Dennis H.; Weinberger, David; Van Wonterghem, Simon; Arnauts, Sophia; Strubbe, Katrien; Holsteyns, Frank; De Gendt, Stefan Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 235 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Oxygen Control Challenge for Advanced Wet Processing. (11th September 2015) Authors: Yoshida, Yukifumi; Otsuji, Masayuki; Takahashi, H.; Snow, Jim; Sebaai, Farid; Holsteyns, Frank; Mertens, Paul W.; Sato, Masanobu; Shirakawa, Hajime; Uchida, H. Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 29 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Photoanodic oxidation of InP in acid solution and its surface chemistry: On the interplay of photons, protons and hydrodynamics. (10th November 2020) Authors: van Dorp, Dennis H.; Vanheusden, Genis; Paulussen, Kris; Hassan, Ibrahim; Van Wonterghem, Simon; Abrenica, Graniel H.; Dara, Praveen; Meersschaut, Johan; Conard, Thierry; Holsteyns, Frank; Kelly, John J. Journal: Electrochimica acta Issue: Volume 360(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Study of Copper Surface Preparation by Sequential Atomic Layer Wet Etching and Laser Annealing Treatments. (15th August 2017) Authors: Iwasaki, Akihisa; Akanishi, Yuya; Mazzamuto, Fulvio; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank Journal: ECS transactions Issue: Volume 80:Number 2(2017) Page Start: 233 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Study of SiGe Surface Cleaning. (15th August 2017) Authors: Komori, Kana; Wostyn, Kurt; Rondas, Dirk; Prado, Jana Loya; Conard, Thierry; Loo, Roger; Ragnarsson, Lars-Åke; Horiguchi, Naoto; Holsteyns, Frank Journal: ECS transactions Issue: Volume 80:Number 2(2017) Page Start: 141 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. The Impact of Dummy Gate Processing on Si-Cap-Free SiGe Passivation: A Physical Characterization Study on Strained SiGe 25% and 45%. (15th August 2017) Authors: Wostyn, Kurt; Ragnarsson, Lars-Åke; Schram, Tom; Witters, Liesbeth; Conard, Thierry; Douhard, Bastien; Vanhaeren, Danielle; Holsteyns, Frank; Vandervorst, Wilfried; Horiguchi, Naoto Journal: ECS transactions Issue: Volume 80:Number 2(2017) Page Start: 155 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗