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MLA Citation
Kaupo Kukli et al.. “Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films.” ECS journal of solid state science and technology, vol. 7, 2018, pp. P287–P294. http://access.bl.uk/ark:/81055/vdc_100160134896.0x000003
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Kaupo Kukli et al.. “Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films.” ECS journal of solid state science and technology, vol. 7, 2018, pp. P287–P294. http://access.bl.uk/ark:/81055/vdc_100160134896.0x000003