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HARVARD Citation
Kukli, K. et al. (2018). Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films. ECS journal of solid state science and technology. pp. P287-P294. [Online].
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Kukli, K. et al. (2018). Atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films. ECS journal of solid state science and technology. pp. P287-P294. [Online].