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APA Citation
Kukli, K., Kemell, M., Castán, H., Dueñas, S., Seemen, H., Rähn, M., Link, J., Stern, R., Heikkilä, M. J., Ritala, M., & Leskelä, M. (2018). atomic Layer Deposition and Performance of ZrO2-Al2O3 Thin Films. ECS journal of solid state science and technology, 7, P287–P294. http://access.bl.uk/ark:/81055/vdc_100160134896.0x000003