Cite
MLA Citation
British Standards Institution,. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films.. London : British Standards Institution, 2022. http://access.bl.uk/ark:/81055/vdc_100146569960.0x000001