Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films. (13th April 2022)

• Record Type: Book
• Authors: British Standards Institution,
• Publisher Details: London : British Standards Institution
• Publication Date: 2022
• Extent: 1 online resource (32 pages)
• Subjects: 602.1841; Calibration; Depth; Thin films; Surfaces; Spectroscopy; X-ray photoelectron spectroscopy; Measurement; Photoelectron spectroscopy; Films (states of matter); Auger electron spectroscopy; Chemical analysis and testing; Ions; Analysis
• Languages: English
• Related ISBNs: 9780539191257
• ISSNs: 3044-3146
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.