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HARVARD Citation
Institution,, B. (2022) Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films.. [Online]. London : British Standards Institution. Available from: http://access.bl.uk/ark:/81055/vdc_100146569960.0x000001