21. Semiconductor devices. Micro-electromechanical devices. Axial fatigue testing methods of thin film materials Part 6, (30th April 2010) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (20 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
22. Semiconductor devices. Micro-electromechanical devices. Bend testing methods of thin film materials Part 18, (31st October 2013) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (18 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
23. Semiconductor devices. Micro-electromechanical devices. Bend-and shear-type test methods of measuring adhesive strength for MEMS structures Part 13, (31st May 2012) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (18 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
24. Semiconductor devices. Micro-electromechanical devices. Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures Part 12, (30th November 2011) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (34 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
25. Semiconductor devices. Micro-electromechanical devices. Bond strength test for glass frit bonded structures using micro-chevron-tests (MCT) Part 27, (22nd July 2020) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (20 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
26. Semiconductor devices. Micro-electromechanical devices. Environmental and dielectric withstand test methods for MEMS piezoelectric thin films Part 36, (24th April 2019) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (20 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
27. Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film Part 30, (9th October 2017) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (24 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
28. Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever Part 42, (24th October 2022) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (24 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
29. Semiconductor devices. Micro-electromechanical devices. MEMS piezoresistive pressure-sensitive device Part 33, (18th April 2019) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (28 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
30. Semiconductor devices. Micro-electromechanical devices. Micro-pillar compression test for MEMS materials Part 10, (30th September 2011) Authors: British Standards Institution, Record Type: Book Extent: 1 online resource (18 pages) View Content: Available online (eLD content is only available in our Reading Rooms) ↗