Semiconductor devices. Micro-electromechanical devices. Micro-pillar compression test for MEMS materials Part 10, (30th September 2011)

Record Type:: Book
Title:: Semiconductor devices. Micro-electromechanical devices. Micro-pillar compression test for MEMS materials Part 10, (30th September 2011)
Main Title:: Semiconductor devices. Micro-electromechanical devices.
Authors:: British Standards Institution,
Issue Display:: Part 10
Part:: 10
Issue Sort Value:: 0000-0000-0000-0010
Publisher Details:: London : British Standards Institution
Publication Date:: 2011
Extent:: 1 online resource (18 pages)
Subjects:: 602.1841
Compression testing
Semiconductor technology
Test specimens
Electronic equipment and components
Stress
Integrated circuits
Electromechanical devices
Semiconductor devices
Strain measurement
Languages:: English
Related ISBNs:: 9780580694479
ISSNs:: 3021-1443
Access Rights:: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
Access Usage:: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library HMNTS - ELD.DS.746619
Ingest File:: 16_009.xml