Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever Part 42, (24th October 2022)

Record Type:
Book
Title:
Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever Part 42, (24th October 2022)
Main Title:
Semiconductor devices. Micro-electromechanical devices.
Authors:
British Standards Institution,
Issue Display:
Part 42
Part:
42
Issue Sort Value:
0000-0000-0000-0042
Publisher Details:
London : British Standards Institution
Publication Date:
2022
Extent:
1 online resource (24 pages)
Subjects:
602.1841
Semiconductor technology
Electronic equipment and components
Semiconductor devices
Semiconductors
Semiconductor diodes
Semiconductor rectifiers
Semiconductor resistors
Languages:
English
Related ISBNs:
9780539165814
ISSNs:
3043-2243
Access Rights:
Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
Access Usage:
Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:
British Library HMNTS - ELD.DS.721276
Ingest File:
14_040.xml