1. Microlithography : science and technology /: science and technology. (2019) Editors: Suzuki, Kazuaki; Smith, Bruce W, 1959- Record Type: Book Extent: 1 online resource, illustrations (black and white) View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Microlithography : science and technology /: science and technology. (©2007) Other Names: Suzuki, Kazuaki; Smith, Bruce W, 1959- Record Type: Book Extent: 1 online resource (848 pages), illustrations View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Physical design and mask synthesis for directed self-assembly lithography. (2018) Authors: Shim, Seongbo; Shin, Youngsoo Record Type: Book Extent: 1 online resource (xiv, 138 pages), illustrations (some color) View Content: Available online (eLD content is only available in our Reading Rooms) ↗