Microlithography : science and technology /: science and technology. (©2007)

• Record Type: Book
• Further Information: Note: Edited by Kazuaki Suzuki, Bruce W. Smith.
• Other Names: Suzuki, Kazuaki; Smith, Bruce W, 1959-
• Contents: EXPOSURE SYSTEM; System Overview of Optical Steppers and Scanners; Michael S. Hibbs; Optical Lithography Modeling; Chris A. Mack; Optics for Photolithography; Bruce W. Smith; Excimer Laser for Advanced Microlithography; Palash Das; Alignment and Overlay; Gregg M. Gallatin; Electron Beam Lithography System; Kazuaki Suzuki; X-Ray Lithography; Takumi Ueno; EUV Lithography; Stefan Wurm and Charles Gwyn; Imprint Lithography; Douglas J. Resnick; RESISTS AND PROCESSING; Chemistry of Photoresist Materials; Takumi Ueno and Robert D. Allen; Resist Processing; Bruce W. Smith; Multilayer Resist Technology; Bruce W. Smith and Maureen Hanratty; Dry Etching of Photoresists; Roderick R. Kunz; METROLOGY AND NANOLITHOGRAPHY; Critical-Dimensional Metrology for Integrated-Circuit Technology; Herschel M. Marchman, Gian Lorusso, Mike Adel, and Sanjay Yedur; Electron Beam Nanolithography; Elizabeth A. Dobisz, Zvonimir Z. Bandic, and Martin C. Peckerar; Index
• Edition: 2nd ed
• Publisher Details: Boca Raton : CRC Press
• Publication Date: 2007
• Copyright Date: 2007
• Extent: 1 online resource (848 pages), illustrations
• Subjects: 621.3815/31; Microlithography -- Industrial applications; Integrated circuits -- Masks; Metal oxide semiconductors, Complementary -- Design and construction; Manufacturing processes; Microlithographie -- Applications industrielles; Circuits intégrés -- Masques; MOS complémentaires -- Conception et construction; Fabrication; TECHNOLOGY & ENGINEERING -- Electronics -- Circuits -- General; Integrated circuits -- Masks; Manufacturing processes; Metal oxide semiconductors, Complementary -- Design and construction; Microlithography -- Industrial applications; Lithographie (Halbleitertechnologie); Electronic books
• Languages: English
• ISBNs: 9781429470605; 1429470607; 9781420051537; 1420051539
• Related ISBNs: 9780824790240; 0824790243
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.