Microlithography : science and technology /: science and technology. (2019)

• Record Type: Book
• Further Information: Note: Edited by Kazuaki Suzuki, Bruce W. Smith.
• Editors: Suzuki, Kazuaki; Smith, Bruce W, 1959-
• Contents: Chapter 1 Lithography, Etch, and Silicon Process Technology [Matthew Colburn, Derren N. Dunn, and Michael A. Guillorn] Chapter 2 Optical Nanolithography [Bruce W. Smith] Chapter 3 Multiple Patterning Lithography [Carlos Fonseca, Chris Bencher, and Bruce Smith] Chapter 4 EUV Lithography Stefan Wurm, Winfried Kaiser, Udo Dinger, Stephan Müllender, Bruno La Fontaine, Obert R. Wood II, and Mark Neisser] Chapter 5 Alignment and Overlay [David Laidler and Gregg M. Gallatin] Chapter 6 Design for Manufacturing and Design Process Technology Co-Optimization [John Sturtevant and Luigi Capodieci] Chapter 7 Chemistry of Photoresist Materials [Takumi Uemo, Robert D. Allen, and James Thackeray] Chapter 8 Photoresist and Materials Processing [Bruce W. Smith] Chapter 9 Optical Lithography Modeling [Chris A. Mack, John J. Biafore, and Mark D. Smith] Chapter 10 Maskless Lithography [Kazuaki Suzuki] Chapter 11 Imprint Lithography [Doug Resnick and Helmut Schift] Chapter 12 Metrology for Nanolithography [Kazuaki Suzuki and Eran Amit] Chapter 13 Directed Self-Assembly of Block Copolymers [Chi-chun Liu, Kenji Yoshimoto, Juan de Pablo, and Paul Nealey]
• Edition: Third edition
• Publisher Details: Boca Raton : CRC Press
• Publication Date: 2019
• Extent: 1 online resource, illustrations (black and white)
• Subjects: 621.381531; Microlithography -- Industrial applications; Integrated circuits -- Masks; Metal oxide semiconductors, Complementary -- Design and construction; Manufacturing processes
• Languages: English
• ISBNs: 9781351643443
• Related ISBNs: 9781439876763; 9781351633949; 9781315117171
• Notes: Note: Description based on CIP data; resource not viewed.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.