1. (Et3Si)2Se as a precursor for atomic layer deposition: growth analysis of thermoelectric Bi2Se3. Issue 18 (14th May 2015) Authors: Sarnet, Tiina; Hatanpää, Timo; Vehkamäki, Marko; Flyktman, Timo; Ahopelto, Jouni; Mizohata, Kenichiro; Ritala, Mikko; Leskelä, Markku Journal: Journal of materials chemistry Issue: Volume 3:Issue 18(2015) Page Start: 4820 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. (Invited) Photo-Assisted ALD: Process Development and Application Perspectives. (14th August 2017) Authors: Miikkulainen, Ville; Väyrynen, Katja; Kilpi, Väinö; Han, Zhongmei; Vehkamäki, Marko; Mizohata, Kenichiro; Räisänen, Jyrki; Ritala, Mikko Journal: ECS transactions Issue: Volume 80:Number 3(2017) Page Start: 49 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Atomic Layer Deposition of Rhenium Disulfide. Issue 24 (5th January 2018) Authors: Hämäläinen, Jani; Mattinen, Miika; Mizohata, Kenichiro; Meinander, Kristoffer; Vehkamäki, Marko; Räisänen, Jyrki; Ritala, Mikko; Leskelä, Markku Journal: Advanced materials Issue: Volume 30:Issue 24(2018) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone. (1st January 2018) Authors: Kukli, Kaupo; Kemell, Marianna; Mizohata, Kenichiro; Vehkamäki, Marko; Kalam, Kristjan; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 2(2018) Page Start: P1 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone. (3rd January 2018) Authors: Kukli, Kaupo; Kemell, Marianna; Mizohata, Kenichiro; Vehkamäki, Marko; Kalam, Kristjan; Castán, Helena; Dueñas, Salvador; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskelä, Markku Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 2(2018) Page Start: P1 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Highly Material Selective and Self‐Aligned Photo‐assisted Atomic Layer Deposition of Copper on Oxide Materials. Issue 11 (6th May 2021) Authors: Miikkulainen, Ville; Vehkamäki, Marko; Mizohata, Kenichiro; Hatanpää, Timo; Ritala, Mikko Journal: Advanced materials interfaces Issue: Volume 8:Issue 11(2021) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Impedance spectroscopy study of the unipolar and bipolar resistive switching states of atomic layer deposited polycrystalline ZrO2 thin films. Issue 4 (21st January 2015) Authors: Kärkkänen, Irina; Shkabko, Andrey; Heikkilä, Mikko; Vehkamäki, Marko; Niinistö, Jaakko; Aslam, Nabeel; Meuffels, Paul; Ritala, Mikko; Leskelä, Markku; Waser, Rainer; Hoffmann‐Eifert, Susanne Journal: Physica status solidi Issue: Volume 212:Issue 4(2015:Apr.) Page Start: 751 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Isosorbide synthesis from cellulose with an efficient and recyclable ruthenium catalyst. Issue 19 (22nd August 2017) Authors: Keskiväli, Juha; Rautiainen, Sari; Heikkilä, Mikko; Myllymäki, Teemu T. T.; Karjalainen, Jaakko-Pekka; Lagerblom, Kalle; Kemell, Marianna; Vehkamäki, Marko; Meinander, Kristoffer; Repo, Timo Journal: Green chemistry Issue: Volume 19:Issue 19(2017) Page Start: 4563 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Metal oxide multilayer hard mask system for 3D nanofabrication. (5th January 2018) Authors: Han, Zhongmei; Salmi, Emma; Vehkamäki, Marko; Leskelä, Markku; Ritala, Mikko Journal: Nanotechnology Issue: Volume 29:Number 5(2018) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization. Issue 7 (22nd January 2023) Authors: Ghafourisaleh, Saba; Vehkamäki, Marko; Vihervaara, Anton; Zhang, Chao; Heikkilä, Mikko J.; Leskelä, Markku; Putkonen, Matti; Ritala, Mikko Journal: Advanced materials interfaces Issue: Volume 10:Issue 7(2023) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗