1. Chemical Mechanical Polishing and Planarization of Mn-Based Barrier/Ru Liner Films in Cu Interconnects for Advanced Metallization Nodes. (1st January 2017) Authors: Sagi, K. V.; Teugels, L. G.; van der Veen, M. H.; Struyf, Herbert; Babu, S. V. Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 5(2017) Page Start: P259 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Chemical Mechanical Polishing and Planarization of Mn-Based Barrier/Ru Liner Films in Cu Interconnects for Advanced Metallization Nodes. (30th March 2017) Authors: Sagi, K. V.; Teugels, L. G.; van der Veen, M. H.; Struyf, Herbert; Babu, S. V. Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 5(2017) Page Start: P259 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Chemical Mechanical Polishing of Chemical Vapor Deposited Co Films with Minimal Corrosion in the Cu/Co/Mn/SiCOH Patterned Structures. (1st April 2017) Authors: Sagi, K. V.; Teugels, L. G.; van der Veen, M. H.; Struyf, Herbert; Alety, S. R.; Babu, S. V. Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 5(2017) Page Start: P276 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Chemical Mechanical Polishing of Chemical Vapor Deposited Co Films with Minimal Corrosion in the Cu/Co/Mn/SiCOH Patterned Structures. (1st January 2017) Authors: Sagi, K. V.; Teugels, L. G.; van der Veen, M. H.; Struyf, Herbert; Alety, S. R.; Babu, S. V. Journal: ECS journal of solid state science and technology Issue: Volume 6:Number 5(2017) Page Start: P276 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Development of Glyoxylic Acid Based Electroless Copper Deposition on Ruthenium. (7th April 2015) Authors: Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Shingubara, Shoso; Tanaka, Tetsu Journal: ECS transactions Issue: Volume 64:Number 40(2014) Page Start: 41 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices. (July 2023) Authors: Samanta, Suprakash; Jin, Seungwan; Lee, Chan-Hee; Lee, Seong-Soo; Struyf, Herbert; Kim, Tae-Gon; Park, Jin-Goo Journal: Applied geography Issue: Volume 161(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum. (24th September 2021) Authors: Ryu, Heon-Yul; Teugels, Lieve; Devriendt, Katia; Struyf, Herbert; Kim, Tae-Gon; Park, Jin-Goo Journal: ECS journal of solid state science and technology Issue: Volume 10:Number 9(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Glyoxylic Acid as Reducing Agent for Electroless Copper Deposition on Cobalt Liner. (7th April 2015) Authors: Inoue, Fumihiro; Philipsen, Harold; van der Veen, Marleen; Van Huylenbroeck, Stefaan; Armini, Silvia; Struyf, Herbert; Shingubara, Shoso; Tanaka, Tetsu Journal: ECS transactions Issue: Volume 64:Number 40(2014) Page Start: 63 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Height Uniformity of Micro-Bumps Electroplated on Thin Cu Seed Layers. (4th May 2016) Authors: Yang, Liu; Slabbekoorn, John; Honore, Mia; Stiers, Karen; Struyf, Herbert; Vereecken, Philippe M; Radisic, Aleksandar Journal: ECS transactions Issue: Volume 72:Number 4(2016) Page Start: 145 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. Nucleation and growth kinetics of electrodeposited Ni films on Si(100) surfaces. (10th March 2017) Authors: Philipsen, Harold; Jehoul, Hannes; Inoue, Fumihiro; Vandersmissen, Kevin; Yang, Liu; Struyf, Herbert; van Dorp, Dennis Journal: Electrochimica acta Issue: Volume 230(2017) Page Start: 407 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗