1. A Research of the Micro-Damage of the Backside TSV Heterogeneous Microstructure after CMP Process with Alkaline Slurry. (10th December 2018) Authors: Wang, Bingquan; Liu, Yuhong; Cheng, Jie; Yan, Ruiheng; Lu, Xinchun Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 12(2018) Page Start: P719 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. A Research of the Micro-Damage of the Backside TSV Heterogeneous Microstructure after CMP Process with Alkaline Slurry. (1st January 2018) Authors: Wang, Bingquan; Liu, Yuhong; Cheng, Jie; Yan, Ruiheng; Lu, Xinchun Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 12(2018) Page Start: P719 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Assembly structures and electronic properties of truxene–porphyrin compounds studied by STM/STS. Issue 24 (15th May 2019) Authors: Xu, Haijun; Shi, Hongyu; Liu, Yuhong; Song, Jian; Lu, Xinchun; Gros, Claude P.; Deng, Ke; Zeng, Qingdao Journal: Dalton transactions Issue: Volume 48:Issue 24(2019) Page Start: 8693 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Chemical Mechanical Polishing of Inlaid Copper Structures with Ru/Ta/TaN as Barrier/Liner Layer. (1st January 2018) Authors: Cheng, Jie; Wang, Bingquan; Wang, Tongqing; Li, Changkun; Lu, Xinchun Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 11(2018) Page Start: P634 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Chemical Mechanical Polishing of Inlaid Copper Structures with Ru/Ta/TaN as Barrier/Liner Layer. (27th October 2018) Authors: Cheng, Jie; Wang, Bingquan; Wang, Tongqing; Li, Changkun; Lu, Xinchun Journal: ECS journal of solid state science and technology Issue: Volume 7:Number 11(2018) Page Start: P634 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
6. Comparative study of the lubricating behavior between 12-in. copper disk and wafer during chemical mechanical polishing. (January 2017) Authors: Zhao, Dewen; He, Yongyong; Wang, Tongqing; Lu, Xinchun Journal: Tribology international Issue: Volume 105(2017) Page Start: 37 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
7. Corrosion- and wear-resistant composite film of graphene and mussel adhesive proteins on carbon steel. (March 2020) Authors: Cheng, Jie; Chen, Sulin; Zhang, Fan; Shen, Bin; Lu, Xinchun; Pan, Jinshan Journal: Corrosion science Issue: Volume 164(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
8. Effect of blowing parameters on bath mixing efficiency during basic oxygen furnace steelmaking process. Issue 7 (28th January 2021) Authors: Wang, Zhou; Liu, Haitao; Wei, Shizhong; Liu, Qing; Lu, Xinchun Journal: Engineering reports Issue: Volume 3:Issue 7(2021) Page Start: n/a Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
9. Effects of wheel spindle vibration on surface formation in wafer self-rotational grinding process. (15th October 2022) Authors: Tao, Hongfei; Liu, Yuanhang; Zhao, Dewen; Lu, Xinchun Journal: International journal of mechanical sciences Issue: Volume 232(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
10. Erratum: Galvanic corrosion inhibitors for Cu/Ru couple during chemical mechanical polishing of Ru [ECS J. Solid-State Sci. Technol., 7, P62 (2017)]. (11th May 2020) Authors: Cheng, Jie; Wang, Tongqing; Lu, Xinchun Journal: ECS journal of solid state science and technology Issue: Volume 9:Number 4(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗