Erratum: Galvanic corrosion inhibitors for Cu/Ru couple during chemical mechanical polishing of Ru [ECS J. Solid-State Sci. Technol., 7, P62 (2017)]. (11th May 2020)

Record Type:: Journal Article
Title:: Erratum: Galvanic corrosion inhibitors for Cu/Ru couple during chemical mechanical polishing of Ru [ECS J. Solid-State Sci. Technol., 7, P62 (2017)]. (11th May 2020)
Main Title:: Erratum: Galvanic corrosion inhibitors for Cu/Ru couple during chemical mechanical polishing of Ru [ECS J. Solid-State Sci. Technol., 7, P62 (2017)]
Authors:: Cheng, Jie
Wang, Tongqing
Lu, Xinchun
Abstract:
Is Part Of:: ECS journal of solid state science and technology. Volume 9:Number 4(2020)
Journal:: ECS journal of solid state science and technology
Issue:: Volume 9:Number 4(2020)
Issue Display:: Volume 9, Issue 4 (2020)
Year:: 2020
Volume:: 9
Issue:: 4
Issue Sort Value:: 2020-0009-0004-0000
Page Start:
Page End:
Publication Date:: 2020-05-11
Subjects:: Solid state chemistry -- Periodicals
Electronics -- Materials -- Periodicals
Electrochemistry -- Periodicals
541.0421
Journal URLs:: https://iopscience.iop.org/journal/2162-8777 ↗
http://www.electrochem.org/ ↗
DOI:: 10.1149/2162-8777/ab8f1a ↗
Languages:: English
ISSNs:: 2162-8777
Deposit Type:: Legaldeposit
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store
Ingest File:: 20918.xml