Cite
MLA Citation
J. Jay McMahon et al.. “Wet Processing for Post-epi & Pre-furnace Cleans in Silicon Carbide Power MOSFET Fabrication.” ECS transactions, vol. 69, 2015, pp. 269–276. http://access.bl.uk/ark:/81055/vdc_100116175940.0x00001a
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J. Jay McMahon et al.. “Wet Processing for Post-epi & Pre-furnace Cleans in Silicon Carbide Power MOSFET Fabrication.” ECS transactions, vol. 69, 2015, pp. 269–276. http://access.bl.uk/ark:/81055/vdc_100116175940.0x00001a