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MLA Citation
Jian Shen et al.. “AFM and SEM Study on Crystallographic and Topographical Evolutions of Wet-Etched Patterned Sapphire Substrate (PSS): Part III. Cone-Shaped PSS Etched in H2SO4 and H3PO4 Mixture at Various Temperatures.” ECS journal of solid state science and technology, vol. 6, 2017, pp. R163–R169. http://access.bl.uk/ark:/81055/vdc_100160140282.0x000005