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APA Citation
Shen, J., Zhang, D., Wang, Y., & Gan, Y. (2017). aFM and SEM Study on Crystallographic and Topographical Evolutions of Wet-Etched Patterned Sapphire Substrate (PSS): Part III. Cone-Shaped PSS Etched in H2SO4 and H3PO4 Mixture at Various Temperatures. ECS journal of solid state science and technology, 6, R163–R169. http://access.bl.uk/ark:/81055/vdc_100160140282.0x000005