Cite
HARVARD Citation
Van Nguyen, S. et al. (2017). Low Hydrogen Silicon Carbon Nitride Cap for High Performance Sub-10 nm Cu-Low k Interconnect. ECS journal of solid state science and technology. pp. P429-P434. [Online].
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Van Nguyen, S. et al. (2017). Low Hydrogen Silicon Carbon Nitride Cap for High Performance Sub-10 nm Cu-Low k Interconnect. ECS journal of solid state science and technology. pp. P429-P434. [Online].