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APA Citation
Garay, A. A., Choi, J. H., Hwang, S. M., & Chung, C. W. (2015). inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas. ECS Solid State Letters, 4, P77–P79. http://access.bl.uk/ark:/81055/vdc_100160137580.0x000013