Cite
HARVARD Citation
Garay, A. et al. (2015). Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas. ECS Solid State Letters. pp. P77-P79. [Online].
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Garay, A. et al. (2015). Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas. ECS Solid State Letters. pp. P77-P79. [Online].