Cite
MLA Citation
Robert Wieland et al.. “Environmental-Friendly Fluorine Mixture for CVD Cleaning Processes to Replace C2F6, CF4 and NF3.” ECS transactions, vol. 72, 2016, pp. 23–34. http://access.bl.uk/ark:/81055/vdc_100117128138.0x00001c
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Robert Wieland et al.. “Environmental-Friendly Fluorine Mixture for CVD Cleaning Processes to Replace C2F6, CF4 and NF3.” ECS transactions, vol. 72, 2016, pp. 23–34. http://access.bl.uk/ark:/81055/vdc_100117128138.0x00001c