Cite
HARVARD Citation
Wieland, R. et al. (2016). Environmental-Friendly Fluorine Mixture for CVD Cleaning Processes to Replace C2F6, CF4 and NF3. ECS transactions. pp. 23-34. [Online].
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Wieland, R. et al. (2016). Environmental-Friendly Fluorine Mixture for CVD Cleaning Processes to Replace C2F6, CF4 and NF3. ECS transactions. pp. 23-34. [Online].