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APA Citation
Dhayalan, S. K., Nuytten, T., Pourtois, G., Simoen, E., Pezzoli, F., Cinquanta, E., Bonera, E., Loo, R., Rosseel, E., Hikavyy, A., Shimura, Y., & Vandervorst, W. (2019). insights into the C Distribution in Si:C/Si:C:P and the Annealing Behavior of Si:C Layers. ECS journal of solid state science and technology, 8, P209–P216. http://access.bl.uk/ark:/81055/vdc_100160135456.0x00000c