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APA Citation
Chou, C., Hsiao, Y., & Wang, S. (2022). zn2SnO4 Thin Film for Ozone Gas Sensor Developed on MEMS Device and Synthesized by HiPIMS Co-sputtering. ECS journal of solid state science and technology, 11, . http://access.bl.uk/ark:/81055/vdc_100158586839.0x000001