Cite
HARVARD Citation
Chou, C. et al. (2022). Zn2SnO4 Thin Film for Ozone Gas Sensor Developed on MEMS Device and Synthesized by HiPIMS Co-sputtering. ECS journal of solid state science and technology. p. . [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Chou, C. et al. (2022). Zn2SnO4 Thin Film for Ozone Gas Sensor Developed on MEMS Device and Synthesized by HiPIMS Co-sputtering. ECS journal of solid state science and technology. p. . [Online].