Cite
MLA Citation
Yongxun Liu et al.. “(Invited) Development of CMOS-MEMS Cointegrated Pressure Sensor Using Minimal Fab Process.” ECS transactions, vol. 97, 2020, pp. 35–46. http://access.bl.uk/ark:/81055/vdc_100108528686.0x000005
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Yongxun Liu et al.. “(Invited) Development of CMOS-MEMS Cointegrated Pressure Sensor Using Minimal Fab Process.” ECS transactions, vol. 97, 2020, pp. 35–46. http://access.bl.uk/ark:/81055/vdc_100108528686.0x000005