Cite
APA Citation
Liu, Y., Akita, I., Matsukawa, T., Tanaka, H., Koga, K., Nemoto, K., Khumpuang, S., Nagao, M., Morita, Y., & Hara, S. (2020). (Invited) Development of CMOS-MEMS Cointegrated Pressure Sensor Using Minimal Fab Process. ECS transactions, 97, 35–46. http://access.bl.uk/ark:/81055/vdc_100108528686.0x000005