Cite
MLA Citation
Jie Li et al.. “Etching characteristics of hydrogenated amorphous carbon with different sp2/sp3 hybridization ratios in CF4/O2 plasmas.” Plasma processes and polymers, vol. 18, no. 11, 2021, p. n/a. http://access.bl.uk/ark:/81055/vdc_100145493290.0x000024