Cite
APA Citation
Okayama, H., Shimura, D., Onawa, Y., Takahashi, H., Seki, M., Koshino, K., Yokoyama, N., Oshtsuka, M., Tsuchizawa, T., Nishi, H., Yamada, K., Yaegashi, H., Horikawa, T., & Sasaki, H. (2013). si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography. Electronics letters, 49(22), 1401–1402. http://access.bl.uk/ark:/81055/vdc_100126834414.0x000034