Cite
HARVARD Citation
Okayama, H. et al. (2013). Si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography. Electronics letters. 49 (22), pp. 1401-1402. [Online].
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Okayama, H. et al. (2013). Si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography. Electronics letters. 49 (22), pp. 1401-1402. [Online].