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MLA Citation
D. Geringswald et al.. “Optimization of a TiN PE-MOCVD Process Using DoE Methodology.” ECS journal of solid state science and technology, vol. 6, 2017, pp. N76–N82. http://access.bl.uk/ark:/81055/vdc_100117134081.0x000009
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D. Geringswald et al.. “Optimization of a TiN PE-MOCVD Process Using DoE Methodology.” ECS journal of solid state science and technology, vol. 6, 2017, pp. N76–N82. http://access.bl.uk/ark:/81055/vdc_100117134081.0x000009