Cite
HARVARD Citation
Geringswald, D. et al. (2017). Optimization of a TiN PE-MOCVD Process Using DoE Methodology. ECS journal of solid state science and technology. pp. N76-N82. [Online].
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Geringswald, D. et al. (2017). Optimization of a TiN PE-MOCVD Process Using DoE Methodology. ECS journal of solid state science and technology. pp. N76-N82. [Online].