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APA Citation
Tseng, W., Long, J., Mohan, K., Kagalwala, T., Wu, C., & Truong, C. (2016). a Combined Gas Cluster Ion Beam (GCIB) and Chemical-Mechanical Polish (CMP) Planarization Scheme for Tungsten Replacement Metal Gate (W-RMG). ECS journal of solid state science and technology, 5, P404–P408. http://access.bl.uk/ark:/81055/vdc_100117116941.0x000004