Cite
APA Citation
Clemente, I., Koehler, N., Miakonkikh, A., Zimmermann, S., Schulz, S. E., & Rudenko, K. (2016). cF3Br plasma cryo etching of low-k porous dielectric. Journal of physics, 741, . http://access.bl.uk/ark:/81055/vdc_100115862527.0x000010