Cite
MLA Citation
I Clemente et al.. “CF3Br plasma cryo etching of low-k porous dielectric.” Journal of physics, vol. 741, 2016, p. . http://access.bl.uk/ark:/81055/vdc_100115862527.0x000010
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I Clemente et al.. “CF3Br plasma cryo etching of low-k porous dielectric.” Journal of physics, vol. 741, 2016, p. . http://access.bl.uk/ark:/81055/vdc_100115862527.0x000010