Cite
MLA Citation
George H. Major et al.. “Spectroscopic ellipsometry of SU‐8 photoresist from 190 to 1680 nm (0.740–6.50 eV).” Surface and interface analysis, vol. 53, 2021, pp. 5–13. http://access.bl.uk/ark:/81055/vdc_100115156417.0x000053
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George H. Major et al.. “Spectroscopic ellipsometry of SU‐8 photoresist from 190 to 1680 nm (0.740–6.50 eV).” Surface and interface analysis, vol. 53, 2021, pp. 5–13. http://access.bl.uk/ark:/81055/vdc_100115156417.0x000053