Cite
MLA Citation
Yang Chen et al.. “16 nm-resolution lithography using ultra-small-gap bowtie apertures.” Nanotechnology, vol. 28, 2017, p. . http://access.bl.uk/ark:/81055/vdc_100087653164.0x000044
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Yang Chen et al.. “16 nm-resolution lithography using ultra-small-gap bowtie apertures.” Nanotechnology, vol. 28, 2017, p. . http://access.bl.uk/ark:/81055/vdc_100087653164.0x000044