Cite
APA Citation
Chen, Y., Qin, J., Chen, J., Zhang, L., Ma, C., Chu, J., Xu, X., & Wang, L. (2017). 16 nm-resolution lithography using ultra-small-gap bowtie apertures. Nanotechnology, 28, . http://access.bl.uk/ark:/81055/vdc_100087653164.0x000044