Cite
MLA Citation
Frederik Schmidt et al.. “Multi frequency matching for voltage waveform tailoring.” Plasma sources science & technology, vol. 27, n.d., p. . http://access.bl.uk/ark:/81055/vdc_100087640636.0x000043
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Frederik Schmidt et al.. “Multi frequency matching for voltage waveform tailoring.” Plasma sources science & technology, vol. 27, n.d., p. . http://access.bl.uk/ark:/81055/vdc_100087640636.0x000043