Cite
APA Citation
Schmidt, F., Schulze, J., Johnson, E., Booth, J., Keil, D., French, D. M., Trieschmann, J., & Mussenbrock, T. (n.d.). multi frequency matching for voltage waveform tailoring. Plasma sources science & technology, 27, . http://access.bl.uk/ark:/81055/vdc_100087640636.0x000043