Cite
MLA Citation
Xu Wang et al.. “Study of CoTa alloy as barrier layer for Cu/low-k interconnects.” Journal of physics, vol. 50, 2017, p. . http://access.bl.uk/ark:/81055/vdc_100087555780.0x00005d
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Xu Wang et al.. “Study of CoTa alloy as barrier layer for Cu/low-k interconnects.” Journal of physics, vol. 50, 2017, p. . http://access.bl.uk/ark:/81055/vdc_100087555780.0x00005d